Lobster series 200Z300S-T0X5 300mm wafer handling robot is a single-armed wafer transfer robot with a rate payload of 0.5kg. It has extremely high accuracy, flexibility and safety.

Features of Lobster200Z300S-T0X5-C Wafer Robot

Single-armed;

Payload is 0.5kg;

3-degrees-of-freedom;

Repositioning accuracy reaches ±0.1mm;

Cleanliness reaches Class100.

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